Open AccessSTUDY OF STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF VO2 THERMOCHROMIC THIN FILMS
Author(s) -
Cui Jing-Zhong,
Daoan Da,
Wanshun Jiang
Publication year - 1998
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.47.454
Subject(s) - thermochromism , materials science , x ray photoelectron spectroscopy , thin film , diffraction , sputter deposition , atomic force microscopy , sputtering , optoelectronics , photoemission spectroscopy , optics , nanotechnology , condensed matter physics , nuclear magnetic resonance , physics
VO2 thermochromic thin films have been deposited by using the magnetron sputtering method. Both macro, micro and electronic structures of the films have been characterized by X-ray diffraction,X-ray photoelectron spectroscopy and atomic force microscopy. The results show that the films have high purity, monophase and excellent polycrystallinity, which are coincident with the optical and electrical properties.