Open AccessCHARACTERIZATION STUDY OF TEXTURED DIAMOND FILMS GROWN ON SILICON (100) SUBSTRATE BY HOT FILAMENT CHEMICAL VAPOR DEPOSITION
Author(s) -
Han Li,
Xiaohui Wang,
Yu Wei,
Lifang Dong,
Xiaowei Li,
Guangsheng Fu
Publication year - 1997
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.46.2206
Subject(s) - materials science , chemical vapor deposition , diamond , substrate (aquarium) , characterization (materials science) , silicon , chemical engineering , deposition (geology) , composite material , nanotechnology , optoelectronics , oceanography , engineering , geology , paleontology , sediment , biology
In this paper, textured (100) diamond films are successfully grown on single crystalline (100) silicon substrate by bias enhanced hot filament chemical vapor deposition from a gas mixture of methane and hydrogen. The films show the well defined facet and are identified to be textured films by means of scanning electron microscopy, Raman spectroscopy and X-ray diffraction analysis. The effects of various parameters have been systematically investigated and the optimum conditions of films growth have been obtained.