Open AccessELECTRICAL CHARACTERISTICS OF METAL CONTACTS ON DIAMOND FILMS
Author(s) -
Guanghua Chen,
Xingwang Zhang,
Yaying Ji,
Yonghai Hui
Publication year - 1997
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.46.1188
Subject(s) - materials science , chemical vapor deposition , diamond , annealing (glass) , electrical contacts , metal , polycrystalline diamond , carbon film , crystallite , thermal , protein filament , composite material , nanotechnology , thin film , metallurgy , physics , meteorology
The polycrystalline diamond films were synthesized by thermal filament chemical vapor deposition technique. The electrical characteristics of contacts between metal and diamond film and the effect of annealing have been investigated. Experimental results showed that the electrical characteristics of Cu contact on diamond film is similar to that of Ag,but different from that of Al. In addition,annealing has a great effect on the contact electrical characteristics.