Open AccessNUCLEATION AND GROWTH PROCESS OF TEXTURED DIAMOND FILMS
Author(s) -
Wenjun Zhang,
Han Li,
Hu Bo,
Fangqing Zhang,
Guanghua Chen
Publication year - 1996
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.45.88
Subject(s) - nucleation , materials science , diamond , scanning electron microscope , substrate (aquarium) , diffraction , chemical engineering , crystallography , nanotechnology , composite material , optics , chemistry , oceanography , physics , organic chemistry , engineering , geology
Textured diamond films were depsited on (100) Si substrates via microwave plasma CVD (MWCVD) with bias - enhanced nucleation or without substrate bias. The samples were identified by means of scanning electron microscopy (SEM) and X-ray diffraction (XRD) to be textured. The nucleation and growth process of textured diamond films were investigated, the mechanism of nucleation and growth were discussed.