Open AccessPREPARATION AND CHARACTERIZATION OF ＰｂＴｉＯ３ THIN FILMS BY METALORGANIC CHEMICAL VAPOR DEPOSITION
Author(s) -
Sun Li,
Yanfeng Chen,
Tao Yu,
NaiBen Ming,
Jiang Xiao-ming,
Xiu Li-Song
Publication year - 1996
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.45.1729
Subject(s) - materials science , thin film , epitaxy , crystallite , metalorganic vapour phase epitaxy , chemical vapor deposition , substrate (aquarium) , ferroelectricity , hysteresis , combustion chemical vapor deposition , carbon film , analytical chemistry (journal) , optoelectronics , composite material , nanotechnology , condensed matter physics , dielectric , layer (electronics) , chemistry , oceanography , physics , chromatography , geology , metallurgy
thin films were deposited on (001) redoping n-Si, (001) Sr substrates by low-pressure MOCVD technique, XRD θθ scan shows that the film on Si substrate has a polycrystalline structure, while the other two films have preferential orientations and their epitaxial nature was confirmed by the X-ray φ scan, rocking curves of the two epitaxial thin films were taken at BSRF using the synchrotron radiation. The film on LaAl substrate has an a,c domain coexisting structure, and the film on substrate only has a c-orientation. All the films exhibit a c-axis shortening compare with the bulk material, and the reason can be attributed to the size effect and surface influence. The ferroelectric properties of the polycrystalline thin films were investigated using the redoping Si substrate as bottom electrode directly, and the thin film shows a perfect hysteresis loop.