Open Access纳米硅薄膜退火特性
Author(s) -
Mingbin Yu,
Yi He,
Hongtao Liu,
Luo Jin-Sheng
Publication year - 1995
Publication title -
wuli xuebao
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.44.634
Subject(s) - materials science , plasma enhanced chemical vapor deposition , silicon , optoelectronics