Open Access高能重离子注入Si中缺陷的抑制
Author(s) -
Lu Wu-Xing,
R.J.Schreatelkamp,
J.R.Liefting,
F.W.Saris
Publication year - 1995
Publication title -
wuli xuebao
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.44.1101
Subject(s) - computer science