Open AccessCOMPOSITION ANALYSIS AND OXYGEN CONTENT DETERMINATION OF HIGH T SUPERCONDUCTING FILMS BY RBS AND EBS METHODS
Author(s) -
Ren Meng-Mei,
Weilin Jiang,
Zhu Peiran
Publication year - 1994
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.43.340
Subject(s) - materials science , superconductivity , content (measure theory) , oxygen , proton , analytical chemistry (journal) , range (aeronautics) , composition (language) , condensed matter physics , chemistry , nuclear physics , physics , composite material , chromatography , mathematical analysis , linguistics , mathematics , philosophy , organic chemistry
In this paper, a technique of proton elastic backscattering (EBS) in the energy range of 1.5-2.5MeV is proposed for the measurement of the total contents of oxy-gen in the films. The accuracy is better than 5% for the film thickness between less than hundreds nm to a few microns.