COMPOSITION ANALYSIS AND OXYGEN CONTENT DETERMINATION OF HIGH T SUPERCONDUCTING FILMS BY RBS AND EBS METHODS | Zendy

REN MENG-MEI | Zendy; Weilin Jiang | Zendy; Zhu Peiran | Zendy

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COMPOSITION ANALYSIS AND OXYGEN CONTENT DETERMINATION OF HIGH T SUPERCONDUCTING FILMS BY RBS AND EBS METHODS

Author(s) -

REN MENG-MEI,

Weilin Jiang,

Zhu Peiran

Publication year - 1994

Publication title -

acta physica sinica

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.199

H-Index - 47

ISSN - 1000-3290

DOI - 10.7498/aps.43.340

Subject(s) - materials science , superconductivity , content (measure theory) , oxygen , proton , analytical chemistry (journal) , range (aeronautics) , composition (language) , condensed matter physics , chemistry , nuclear physics , physics , composite material , chromatography , mathematical analysis , linguistics , mathematics , philosophy , organic chemistry

In this paper, a technique of proton elastic backscattering (EBS) in the energy range of 1.5-2.5MeV is proposed for the measurement of the total contents of oxy-gen in the films. The accuracy is better than 5% for the film thickness between less than hundreds nm to a few microns.

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