Open AccessFABRICATION AND CHARACTERIZATION OF SPUTTERED W/C MULTILAYER MIRROR FOR SOFT X-RAY
Author(s) -
Jianda Shao,
Fan Zheng-Xiu,
Guodong Yin,
Kui Yao,
Lixiang Yuan
Publication year - 1994
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.43.2015
Subject(s) - materials science , fabrication , characterization (materials science) , optics , planar , x ray , sputter deposition , sputtering , cavity magnetron , optoelectronics , physics , thin film , nanotechnology , computer graphics (images) , computer science , medicine , alternative medicine , pathology