Open AccessSTUDIES OF LATTICE DAMAGE CAUSED BY 1MeV Si+ IMPLANTATION INTO Al0.3Ga0.7As/GaAs SUPERLATTICES AND GaAs AT ELEVATED SUBSTRATE TEMPERATURE
Author(s) -
Li Dai-qing,
Gong Baoan,
Wan Ya,
Zhu Peiran,
Zhou Jun-si,
Xu Tian-bing,
Shanming Mu,
QingTai Zhao,
Zhong-Lie Wang
Publication year - 1994
Publication title -
acta physica sinica
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.43.1311
Subject(s) - superlattice , materials science , substrate (aquarium) , condensed matter physics , semiconductor materials , lattice (music) , optoelectronics , semiconductor , physics , biology , acoustics , ecology
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