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TEM STUDY OF MICROSTRUCTURAL CHANGES INDUCED BY AR ION IMPLANTATION IN YBa2Cu3O7-x SUPERCONDUCTING FILMS
Author(s) -
Yijie Li,
Ge Xiong,
Zizhao Gan,
Ren Cong-xin,
Shichang Zou
Publication year - 1993
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.42.482
Subject(s) - fluence , materials science , superconductivity , epitaxy , ion , ion implantation , condensed matter physics , lattice (music) , oxygen , transition temperature , nanotechnology , chemistry , physics , organic chemistry , layer (electronics) , acoustics
Ar ion implantation induced superconductivity change and structural change in YBa2Cu3O7-x epitaxial films have been studied. After implantation, not only Jc and Tc of the sa-mples decreased with the increasing of Ar ion fluence, but also a metal-to-semiconducfor transition occurred. The TEM photographs showed that the lattice frame of the implanted sa-mples was nearly unchanged under low fluence. Only at high fluence, the structure was comple-tely destroyed. According to the experimental results, we suggest that the degradation of Jc and Tc may mainly result from the disordering of oxygen sublattice.

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