Open AccessDEPOSITION OF LARGE AREA SUPERCONDUCTING FILMS BY EXCIMER LASER SCANNING ABLATION
Author(s) -
Song Wen-Dong,
Chen An,
Dongsheng Lu,
Fan Yong-Chang,
Zaiguang Li,
Huang Jing-Qing,
Zhong Hong-Hai,
Xin Zhao,
Zhihong Mai,
Fang Zhou,
Qianqian Guo,
Yue-Nan Li,
Hua Zhi-Qiang
Publication year - 1993
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.42.1674
Subject(s) - materials science , superconductivity , excimer laser , deposition (geology) , laser ablation , pulsed laser deposition , thin film , laser , excimer , optics , beam (structure) , optoelectronics , condensed matter physics , nanotechnology , physics , paleontology , sediment , biology
Using a special optical transmission system, excimer laser beam can scan on the superconducting target, scanning laser beam ablates the target resulting in deposition of superconducting films. The thickness uniformity of large area superconducting films can be improved by this method. The superconducting films on 12mm×33mm Y-ZrO2 substrates show good thickness uniformity, zero resistance temperature Tc≥90K, critical current density at 77K and zero field Jc≥l×106A/cm2.