Open AccessA MASS TRANSFER MODEL FOR THE PLASMA DEPOSITION PROCESS IN AXIAL-FLOW REACTOR
Author(s) -
Zuli Liu,
Zhu Da-Qi,
Song Wen-Dong,
Junfang Chen
Publication year - 1992
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.41.617
Subject(s) - deposition (geology) , volumetric flow rate , materials science , plasma , mass transfer , mechanics , flow (mathematics) , mass flow rate , process (computing) , nuclear engineering , thermodynamics , analytical chemistry (journal) , chemistry , physics , nuclear physics , environmental chemistry , computer science , paleontology , sediment , biology , operating system , engineering
A kinetic model for the glow discharge plasma deposition process in the axial-flow reactor is proposed. In particular, the realtionships between the deposition characteristics (i.e., generation rate, generation frequency, deposition rate, and gas efficiency) and the process parameters (gas flow rate and gas pressure) are examined by numerical modeling technique. Some results has been explained.