Open AccessPRIMARY STUDY ON THE IRRADIATION EFFECT OF HYDROGEN IONS ON DIAMOND-LIKE CARBON FILMS
Author(s) -
Tianmin Wang,
Weijie Wang,
Han Pei-Gang,
Huang Liang-fu,
Luo Chong-Tai
Publication year - 1992
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.41.276
Subject(s) - materials science , irradiation , raman spectroscopy , ion , electrical resistivity and conductivity , substrate (aquarium) , analytical chemistry (journal) , carbon fibers , diamond , composite material , chemistry , optics , composite number , organic chemistry , physics , oceanography , electrical engineering , geology , nuclear physics , engineering
Diamond-like carbon (DLC) films, prepared by dual-ion beam sputtering method on glass substrate, were irradiated by high energy hydrogen ions(H+) under different combinations of ion energy and irradiation dose. Raman spectroscopy, infra-red transmittance spectroscopy, electrical resistivity measurement and adhesive force determination were used to characterize the as-deposited and the irradiated films. The results showed that, comparing with that of as-deposited ones, the properties and structures of irradiated films were changed obviously: the infra-red transmittance in the range of 1450 to 6000 cm-1 was increased; the electrical resistivity had nearly no large change. The relative ratios of sp2 C-H bond to sp3 C-H bond and sp3 C-C bond to sp2 C-C bond were also increased, while the component of sp3 C-C bond and sp2 C-C bond was decreased because of H+ irradiation. On the basis of the above results., the relations between properties and structures for irradiation On the basis of the above results, the relations between properties and structures for irradiated films were discussed in detail between properties and structures for irradiated films were discussed in detail. It is concluded It is concluded that the H+ irradiation effect on DLC films is different from that of Cc or other heavier ions. The main role of H+ on the films is the teching effect on weaker bonds. We believe that it is possible to improve the properties of DLC films by means of high energy H+ irradiation.