Open AccessINVESTIGATION ON THE PHYSICAL PROPERTIES AND DEFECTS OF Cd2SnO4 FILMS DEPOSITED BY RF REACTIVE SPUTTERING
Author(s) -
Peng Dongliang,
Jiang Shengrui
Publication year - 1992
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.41.2055
Subject(s) - materials science , sputtering , substrate (aquarium) , electrical resistivity and conductivity , tin , deposition (geology) , alloy , atmosphere (unit) , tin oxide , thin film , analytical chemistry (journal) , oxygen , oxide , composite material , metallurgy , nanotechnology , chemistry , physics , paleontology , oceanography , engineering , organic chemistry , chromatography , sediment , electrical engineering , biology , geology , thermodynamics
Transparent conductiong films of cadmium-tin oxide were prepared by rf reactive sputtering from a Cd-Sn alloy target in an Ar-O2 atmosphere. The structure of the films was examined by X-ray diffraction. The electrical and optical properties of the films were found to depend on the oxygen concentration in the gas mixture and the substrate temperature as well as the post-deposition heat treatment. The lowest resistivity obtained was 1.74×10-6Ω·cm and the highest optical transmission was 95% over the visible region. For the films deposited at substrate temperature of 400℃ in an Ar-O2 atmosphere of 6% O2, heat treatment increased the optical gap energy from 2.37eV to 2.64eV.