Open AccessEFFECT OF SURFACE LOCAL ENRICHMENT ON PREFEREN-TIAL SPUTTERIONG OF ALLOY
Author(s) -
Zhenxia Wang,
Jisheng Pan,
Jiping Zhang,
Tao Zhenlan
Publication year - 1992
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.41.1722
Subject(s) - electron microprobe , alloy , materials science , ion , surface (topology) , analytical chemistry (journal) , metallurgy , physics , chemistry , geometry , chromatography , quantum mechanics , mathematics
The angular distributions of atoms sputtered from Ni-50Wt%Ti, Fe-30Wt%W and Ag-50Wt%Cu alloys by 27keV Ar+ ions bombardment nave been masured. It has been found that Ti, Fe and Ag atoms were sputtered preferentially at small angles. The sputtered surfaces have been analyzed by SEM combined with EPMA. It has been showed that all the surface topographies of three samples consisted of two different parts i.e. convex and concave regions, corr responding dif ferent components being richer at different region. A model has been suggested to explan this phenomenon.