Open AccessSTUDY OF AlGaAs/GaAs WAVEGUIDE STRUCTURE BY X-RAY DOUBLE CRYSTAL DIFFRACTION
Author(s) -
Mai Zhang,
Gui Shu-Fan,
Chaoying Wang,
Wu Lan-Sheng
Publication year - 1991
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.40.969
Subject(s) - diffraction , materials science , reflection (computer programming) , optics , diffraction topography , crystal (programming language) , substrate (aquarium) , dynamical theory of diffraction , waveguide , x ray , x ray crystallography , sample (material) , optoelectronics , physics , diffraction grating , acousto optics , computer science , oceanography , programming language , geology , thermodynamics
An AlGaAs/GaAs waveguide structure sample was investigated by X-ray double crystal diffraction technique. Based on the X-ray dynamical diffraction theory the reflection intensities of the substrate and the films were calculated. Comparing the calculated results with the experimental ones, the real structure of the sample was obtained. The factors affecting the double crystal diffraction recking curves are discussed.