Open AccessINVESTIGATION OF THE SEMICONDUCTOR STRAINED SUPERLATTICE STRUCTURE AND INTERFACE BY X-RAY ROCKING-CURVE ANALYSIS
Author(s) -
Zhu Nan-Chang,
Li Run-Shen,
Xu Shunsheng
Publication year - 1991
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.40.433
Subject(s) - superlattice , diffraction , condensed matter physics , materials science , dynamical theory of diffraction , x ray crystallography , optics , physics , acousto optics , diffraction grating
The dynamical theory as developed by Takagi and Taupin for imperfect crystals has been applied to analyse the intensity distribution of the superlattice diffraction peaks, and to compute the rocking curves when the interface grading and the period thickness fluctuation are present. The reason why the interference fringes between the superlattice diffraction peaks disappear and the superlattice diffraction peaks broaden are discussed. It is clear that the intensity distribution of the superlattice diffraction peaks depends on the superlattice period thickness, the composition and strain in it. The interface gradient and the period thickness fluctuation may affect the double-crystal rocking curves. The main reason of the superlattice diffraction peak broadening is the bending of lattice plane.