Open AccessA RESEARCH OF THE CORRELATION BETWEEN SURFACE TOPOGRAPHY AND ANGULAR DISTRIBUTION OF SPUTTERED ATOMS
Author(s) -
Zhenxia Wang,
Jisheng Pan,
Tao Zhenlan,
Jiping Zhang,
Huiming Zhang,
Weiping Zhang,
Lu Zhao-Lun
Publication year - 1991
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.40.316
Subject(s) - sputtering , materials science , polar , surface (topology) , atomic physics , ion , optics , molecular physics , physics , geometry , thin film , nanotechnology , mathematics , astronomy , quantum mechanics
The angular distributions of sputtered atoms of cadmium have been measured with 27 keV Ar+ ion bombardment at normal incidence with different target temperature by using collector technique and RBS analysis. After the sputtering experiment the surface structures have been observed using scanning electron microscope. For all samples the angular distributions are over-cosine. However, the values of the deviation △ from the cosine distribution at the axis of polar angle of 0°is not all the same. The deviation △T at the target temperature of 150℃ △R is smaller than that at room teperature. ie. △TR. A simple model is proposed to explain the formation of pattern of angular distribution.