Open AccessXPS AND AES STUDY FOR Au/a-Si:H INTERFACE
Author(s) -
钟战天,
王大文,
廖显伯,
范越,
李承芳,
牟善明
Publication year - 1991
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.40.275
Subject(s) - x ray photoelectron spectroscopy , materials science , annealing (glass) , cluster (spacecraft) , metal , silicon , analytical chemistry (journal) , chemistry , nuclear magnetic resonance , optoelectronics , metallurgy , physics , chromatography , computer science , programming language
The Au/a-Si:H contact has been investigated by XPS and AES. It is found that the metal cluster occurs, at initial formation process of Au/a-Si:H interface, and after exceeding the critical Au deposition value, the Vinterdiffusion and chemical reaction of Au and Si begin and Au-Si intermixing region is formed. Furthermore, the experimental results of photoemission study confirm that Si islands are formed after annealing the interface of Au/a-Si:H.