XPS AND AES STUDY FOR Au/a-Si:H INTERFACE | Zendy

ZHONG ZHAN-TIAN | Zendy; Dawen Wang | Zendy; Xianbo Liao | Zendy; Yue Fan | Zendy; Chengfang Li | Zendy; MOU SHAN-MING | Zendy

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XPS AND AES STUDY FOR Au/a-Si:H INTERFACE

Author(s) -

ZHONG ZHAN-TIAN,

Dawen Wang,

Xianbo Liao,

Yue Fan,

Chengfang Li,

MOU SHAN-MING

Publication year - 1991

Publication title -

acta physica sinica

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.199

H-Index - 47

ISSN - 1000-3290

DOI - 10.7498/aps.40.275

Subject(s) - x ray photoelectron spectroscopy , materials science , annealing (glass) , cluster (spacecraft) , metal , silicon , analytical chemistry (journal) , chemistry , nuclear magnetic resonance , optoelectronics , metallurgy , physics , chromatography , computer science , programming language

The Au/a-Si:H contact has been investigated by XPS and AES. It is found that the metal cluster occurs, at initial formation process of Au/a-Si:H interface, and after exceeding the critical Au deposition value, the Vinterdiffusion and chemical reaction of Au and Si begin and Au-Si intermixing region is formed. Furthermore, the experimental results of photoemission study confirm that Si islands are formed after annealing the interface of Au/a-Si:H.

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