Open AccessMONTE CARLO CALCULATION OF PREFERENTIAL SPUTTE-RING IN MULTI-COMPONENT TARGET
Author(s) -
Pan Zhang,
Jianxin Chen,
Wu Shi-Ming,
Huo Yu-Kun
Publication year - 1990
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.39.319
Subject(s) - sputtering , monte carlo method , component (thermodynamics) , amorphous solid , collision , materials science , ion , atomic physics , surface (topology) , molecular physics , physics , chemistry , thin film , thermodynamics , nanotechnology , crystallography , computer science , geometry , statistics , mathematics , computer security , quantum mechanics
Based upon the binary collision approximation (BCA), the Monte Carlo methods are employed to study sputtering of multi-component amorphous targets. Total and partial sputtering yields, energy and angular distribution and the escape depth distribution of sputtered particles are given. The changes of surface concentrations are also studied The results indicate that the collisional effect may account for the preferential sputtering, which plays an important role in surface composition changes due to ion bombardment.