Open AccessSTUDIES AND ANALYSIS FOR MICROSTRUCTURES OF MICRO-CRYSTALLIZATION PROCESS OF AMORPHOUS SILICON FILMS
Author(s) -
Yi He,
Zhou Hengnan,
Liu Xiangna,
Cheng Guang-Xu,
Yu Shi-Dong
Publication year - 1990
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.39.1796
Subject(s) - materials science , amorphous solid , crystallization , microcrystalline , nanocrystalline silicon , microstructure , amorphous silicon , silicon , phase (matter) , polyamorphism , diffraction , chemical engineering , crystallography , crystalline silicon , optics , optoelectronics , composite material , chemistry , physics , engineering , organic chemistry
We have studied the fine procedure and characters of the microstructures for the a-Si:H and a-Si films, which have been changed from amorphous phase to microcrystalline phase, by means of Rigaku 3015 type X-ray diffraction spectroscope and high resolution electronic microscopy (HREM). This research provides some intuitive information for the transformation process, in which amorphous silicon filims change over from amorphous phase to micro-crystalline phase, and further deepens the understanding for the microstructures of amorphous silicon films.