Open AccessTHE EFFECT OF ANHARMONIC INTERACTIONS AMONG LATTICE ATOMS ON THE ION IMPLANTATION
Author(s) -
LlU Jia-Rui,
Jianhua Zhang,
Li Yi
Publication year - 1989
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.38.1400
Subject(s) - anharmonicity , excited state , ion , atomic physics , lattice (music) , phonon , spectral line , range (aeronautics) , stopping power , physics , materials science , condensed matter physics , quantum mechanics , acoustics , composite material
The interactions between incident particles and solids in ion implantation have been in-vestigated based on the generalized Langevin equation of classical dynamics. Considering an-harmonic effects of interactions among lattice atoms the energy exchange between incident particles and target atoms, the nuclear stopping power and the distributions of project ranges have been calculated numerically. The effect of the phonon spectra excited by the incident particles has been discussed also. All calculations are in good agreement with the results of the program TRIM88 in the low energy range.