Open AccessSURVEY OF PREBREAKDOWN PARAMETERS OF NF3
Author(s) -
Zhengying Li
Publication year - 1988
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.37.1545
Subject(s) - drift tube , ion , electron , materials science , ionic bonding , atomic physics , mass spectrometry , excimer laser , analytical chemistry (journal) , laser , chemistry , physics , optics , nuclear physics , organic chemistry , chromatography
Using the pulsed drift-tube-mass spectrometer system, we measured the prebreakdown pa-rameters of NF3 mixtures used in excimer lasers or produced in discharges of SF6 mixtures, including electron attachment coefficients, attachment rate coefficients, ionic mobilities and kinds of negative ions. The relations between electron attachment rate coefficients and mean electron energies are measured as well.