Open AccessTHE LINE SHAPE ANALYSIS FOR Si L2,3 VV AUGER SPECTRA OF CLEAVED Si (111) SURFACES WITH OXYGEN ADSORBED
Author(s) -
Xu Zhi-Zhong,
Dai Dao-Xuan,
Zou Hui-Liang
Publication year - 1985
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.34.32
Subject(s) - adsorption , auger , oxygen , spectral line , materials science , deconvolution , analytical chemistry (journal) , oxide , silicon , atomic physics , chemistry , physics , optics , chromatography , astronomy , metallurgy , organic chemistry
By digital integration, background subtraction and self-deconvolution for SiL2,3VV Auger spectra measured on the cleaved clean Si (111) surface and that with oxygen adsorbed, the partial transition densities of state of clean surface and adsorbed surface are obtained. With reference to other experimental and theoretical results, it could be inferred from these partail transition densities of state that oxygen is adsorbed both in a molecular state and in an atomic state, and in the adsorbed stage the oxide may also be formed.