Open AccessTHE MECHANISM OF THE SECONDARY ION EMISSION INVESTIGATED BY THE EFFECT OF ENERGETIC ELECTRONS
Author(s) -
AiMin Zhu,
Wu Xi-Lin
Publication year - 1984
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.33.1475
Subject(s) - ion , electron , irradiation , materials science , atomic physics , secondary emission , spectral line , secondary electrons , quantum tunnelling , highly charged ion , physics , optoelectronics , ion source , quantum mechanics , astronomy , nuclear physics
The surface potential of the sample was changed by the irradiation of energetic electrons. The energy spectra of varieties of sputtered ion species were measured with different surface potential. It was found that under conventional condition, particularly when there was oxygen enhanced emission, the resonant electron tunneling would not reduce the savival probability of sputtered ions. The energy spectra were also used to investigate the dynamic aspect of the ion emmission. The dynamic parameters indicated that the surface potential which the ion yield depended on was highly localized. In addition, the electron irradiation could be helpful in improving the quatitative analysis of the SIMS even for metals.