Open AccessTHE EFFECT OF CRYSTALLIZATION ON HYDROGEN CONTENTS AND BONDING STRUCTURE OF A-Si:H FILMS
Author(s) -
Yi He,
Yiming Yan
Publication year - 1984
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.33.1472
Subject(s) - crystallization , materials science , hydrogen bond , hydrogen , crystal structure , grain size , crystallography , phase (matter) , chemical engineering , composite material , molecule , chemistry , organic chemistry , engineering
This paper presents the dependence of the hydrogen contents and the Si-H bonding structure on crystallization in a-Si: H films. The hydrogen contents decreases dramatically and the bonding from transforms from Si-H to Si-H2 obviously when the grain size increases to about 200±50?. We suggest that the 200±50? is a phase transition point corresponds to transformation from mirco-crystalline-Si: H to poly- crystalline-like modification.