THE EFFECT OF CRYSTALLIZATION ON HYDROGEN CONTENTS AND BONDING STRUCTURE OF A-Si:H FILMS | Zendy

Yuliang He | Zendy; Yan Yonghong | Zendy

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THE EFFECT OF CRYSTALLIZATION ON HYDROGEN CONTENTS AND BONDING STRUCTURE OF A-Si:H FILMS

Author(s) -

Yuliang He,

Yan Yonghong

Publication year - 1984

Publication title -

acta physica sinica

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.199

H-Index - 47

ISSN - 1000-3290

DOI - 10.7498/aps.33.1472

Subject(s) - crystallization , materials science , hydrogen bond , hydrogen , crystal structure , grain size , crystallography , phase (matter) , chemical engineering , composite material , molecule , chemistry , organic chemistry , engineering

This paper presents the dependence of the hydrogen contents and the Si-H bonding structure on crystallization in a-Si: H films. The hydrogen contents decreases dramatically and the bonding from transforms from Si-H to Si-H2 obviously when the grain size increases to about 200±50?. We suggest that the 200±50? is a phase transition point corresponds to transformation from mirco-crystalline-Si: H to poly- crystalline-like modification.

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