Open AccessCALCULATION OF RANGE STATISTIC PARAMETERS FOR IONS IMPLANTED IN GaAs
Author(s) -
Cheng Zhao-Nian,
Wei Zhu,
Weiyuan Wang
Publication year - 1982
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.31.922
Subject(s) - statistic , range (aeronautics) , divergence (linguistics) , ion , computation , computational physics , simple (philosophy) , mathematics , computer science , algorithm , physics , atomic physics , statistics , materials science , quantum mechanics , linguistics , philosophy , epistemology , composite material
Based on successive correction method, we have solved LSS equation numerically and calculated the range statistic parameters Rp,△Rp and R⊥ for ions implanted in GaAs. We propose simple formulas for initial values in calculating Rp,△Rp and R⊥; by using these formulas, the zero-energy divergence can be avoided and sufficient accuracy achieved. The expressions for β-integration are given to save computation time. Our numerical method and computer program can also be used to other ion-target systems.