Open Access扩散硼后在硅表面上生成的表面膜的一种消除法
Author(s) -
黄景森
Publication year - 1964
Publication title -
wuli xuebao
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.20.285
Subject(s) - materials science