Open AccessPENGARUH ANIL TERMAL TERHADAP BESARAN OPTIS LAPISAN TIPIS a-SiC:H HASIL METODE DC SPUTTERING II. TARGET GRAFIT
Author(s) -
Rosari Saleh,
Lusitra Munisa,
Dewi Marianty
Publication year - 2010
Publication title -
makara seri sains
Language(s) - Uncategorized
Resource type - Journals
ISSN - 1693-6671
DOI - 10.7454/mss.v7i1.307
Subject(s) - sputtering , physics , materials science , nanotechnology , thin film