Open AccessPENGARUH ANIL TERMAL TERHADAP BESARAN OPTIS LAPISAN TIPIS a-SiC:H HASIL METODE DC SPUTTERING II. TARGET GRAFIT
Author(s) -
Rosari Saleh,
Lusitra Munisa,
Dewi Marianty
Publication year - 2010
Publication title -
makara of science series
Language(s) - Uncategorized
Resource type - Journals
ISSN - 1693-6671
DOI - 10.7454/mss.v7i1.307
Subject(s) - sputtering , physics , materials science , nanotechnology , thin film
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