Open AccessImprovement of uniformity in chemical vapor deposition of silicon carbide using CFD
Author(s) -
Jin-Won Seo,
Junwoo Kim,
Yoon-Soo Hahn,
Kyoon Choi,
Jong Heun Lee
Publication year - 2014
Publication title -
han-guk gyeoljeong seongjang hakoeji/han'gug gyeoljeong seongjang haghoeji
Language(s) - English
Resource type - Journals
eISSN - 2234-5078
pISSN - 1225-1429
DOI - 10.6111/jkcgct.2014.24.6.242
Subject(s) - susceptor , silicon carbide , chemical vapor deposition , materials science , graphite , computational fluid dynamics , silicon , carbide , composite material , nanotechnology , optoelectronics , mechanics , epitaxy , physics , layer (electronics)