Open AccessGrowth of O- and Zn-polar ZnO films by DC magnetron sputtering
Author(s) -
Jae-Ho Yoo,
Soon-Ho Choi,
Sung-Yoon Jung,
Youngji Cho,
SangTae Lee,
Gyung-Suk Kil,
Hyun-Jae Lee,
Takafumi Yao,
Jiho Chang
Publication year - 2012
Publication title -
han-guk gyeoljeong seongjang hakoeji/han'gug gyeoljeong seongjang haghoeji
Language(s) - English
Resource type - Journals
eISSN - 2234-5078
pISSN - 1225-1429
DOI - 10.6111/jkcgct.2012.22.1.001
Subject(s) - hillock , materials science , sputtering , epitaxy , substrate (aquarium) , sputter deposition , etching (microfabrication) , cavity magnetron , thin film , analytical chemistry (journal) , growth rate , optoelectronics , nanotechnology , chemistry , layer (electronics) , composite material , geology , oceanography , geometry , mathematics , chromatography