Open AccessCharacterizations of Characterizations of Tio2thin films with atmosphere control of the RF magnetron sputtering
Author(s) -
Ju-Hoon Park,
Bongsoo Kim,
Byung–Hoon Kim
Publication year - 2011
Publication title -
han-guk gyeoljeong seongjang hakoeji/han'gug gyeoljeong seongjang haghoeji
Language(s) - English
Resource type - Journals
eISSN - 2234-5078
pISSN - 1225-1429
DOI - 10.6111/jkcgct.2011.21.2.065
Subject(s) - diffractometer , materials science , thin film , scanning electron microscope , anatase , analytical chemistry (journal) , crystallite , sputter deposition , sputtering , substrate (aquarium) , chemistry , nanotechnology , composite material , metallurgy , biochemistry , oceanography , chromatography , photocatalysis , geology , catalysis