Open AccessFabrication of Three-Dimensional Micro Optical and Fluidic System Using Dual Stage Nanostereolithography Process
Author(s) -
Tae Woo Lim,
DongYol Yang
Publication year - 2015
Publication title -
korean journal of air-conditioning and refrigeration engineering
Language(s) - English
Resource type - Journals
eISSN - 2465-7611
pISSN - 1229-6422
DOI - 10.6110/kjacr.2015.27.10.552
Subject(s) - fabrication , materials science , fluidics , surface micromachining , femtosecond , laser , microfluidics , process (computing) , optoelectronics , nanotechnology , optics , computer science , engineering , electrical engineering , medicine , alternative medicine , pathology , operating system , physics
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