Open AccessA Study on the Process Conditions Optimization for Al-Cu Metal Line Corrosion Improvement
Author(s) -
Seong Yeol Mun,
Seong Jun Kang,
Yang Hee Joung
Publication year - 2012
Publication title -
han-guk jeongbo tongsin hakoe nonmunji
Language(s) - English
Resource type - Journals
eISSN - 2288-4165
pISSN - 2234-4772
DOI - 10.6109/jkiice.2012.16.11.2525
Subject(s) - corrosion , materials science , metal , metallurgy , alloy , reliability (semiconductor) , process (computing) , computer science , power (physics) , physics , quantum mechanics , operating system