Open AccessSELECTIVE GROWTH OF THIN CARBON FILMS ON DIELECTRICS SUBSTRATES
Author(s) -
Д. М. Седловец,
M. A. Knyazev
Publication year - 2018
Publication title -
izvestiâ vysših učebnyh zavedenij. himiâ i himičeskaâ tehnologiâ/izvestiâ vysših učebnyh zavedenij. seriâ himiâ i himičeskaâ tehnologiâ
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.221
H-Index - 5
eISSN - 2500-3070
pISSN - 0579-2991
DOI - 10.6060/tcct.20165908.19y
Subject(s) - materials science , dielectric , thin film , carbon film , carbon fibers , pyrolysis , irradiation , composite material , chemical engineering , optoelectronics , nanotechnology , composite number , physics , nuclear physics , engineering
The method of control of the quality of thin carbon films obtained by ethanol vapor pyrolysis on the surface of dielectric substrates which was preliminary irradiated by e-beam is described. The influence of the exposure doses on the structural perfection of the obtained films was studied.