Open AccessLaser-assisted atom probe tomography of c-plane and m-plane InGaN test structures
Author(s) -
Norman A. Sanford,
Paul T. Blanchard,
Matthew D. Brubaker,
Ashwin K. Rishinaramangalam,
Q. Zhang,
Alexana Roshko,
Daniel Feezell,
Benjamin Klein,
Albert V. Davydov
Publication year - 2022
Language(s) - English
Resource type - Reports
DOI - 10.6028/nist.tn.2201
Subject(s) - indium , atom probe , materials science , laser , analytical chemistry (journal) , coaxial , metalorganic vapour phase epitaxy , optics , physics , chemistry , optoelectronics , layer (electronics) , epitaxy , transmission electron microscopy , nanotechnology , electrical engineering , engineering , chromatography