Open AccessSemiconductor Microelectronics and Nanoelectronics Programs
Author(s) -
Joaquin V Martinez de Pinillos,
Yaw S. Obeng,
Michele Buckley
Publication year - 2010
Language(s) - English
Resource type - Reports
DOI - 10.6028/nist.ir.7686
Subject(s) - nanoelectronics , microelectronics , semiconductor , nanotechnology , semiconductor device , engineering , computer science , engineering physics , materials science , electrical engineering , layer (electronics)