Open AccessSemiconductor microelectronics and nanoelectronics programs
Author(s) -
Stephen Knight,
Joaquin V Martinez de Pinillos,
Yaw S. Obeng,
Michele Buckley
Publication year - 2008
Language(s) - English
Resource type - Reports
DOI - 10.6028/nist.ir.7513
Subject(s) - nanoelectronics , microelectronics , semiconductor , nanotechnology , optoelectronics , engineering , engineering physics , materials science