Open AccessWorkshop on temperature measurement of semiconductor wafers using thermocouples
Author(s) -
K.G. Kreider,
Dorothy DeWitt,
B.K. Tsai,
B. Lojek
Publication year - 2001
Language(s) - English
Resource type - Reports
DOI - 10.6028/nist.ir.6566
Subject(s) - thermocouple , wafer , semiconductor , temperature measurement , materials science , optoelectronics , electrical engineering , engineering physics , engineering , composite material , thermodynamics , physics
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