Open AccessWorkshop on temperature measurement of semiconductor wafers using thermocouples
Author(s) -
Kenneth G. Kreider,
D P. DeWitt,
Benjamin K. Tsai,
B. Lojek
Publication year - 2001
Language(s) - English
Resource type - Reports
DOI - 10.6028/nist.ir.6566
Subject(s) - thermocouple , wafer , semiconductor , temperature measurement , materials science , optoelectronics , electrical engineering , engineering physics , engineering , composite material , thermodynamics , physics