Open AccessMechanical properties of aluminum nitride substrates
Author(s) -
Jay S. Wallace,
E.R. Fuller,
Stephen W. Freiman
Publication year - 1996
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.6028/nist.ir.5903
Subject(s) - nitride , aluminium , materials science , nanotechnology , composite material , layer (electronics)