
Nanolithography Toolbox
Author(s) -
Robert R. Ilic,
Krishna C. Balram,
Daron Westly,
Marcelo Davanço,
Karen E. Grutter,
Qing Li,
Thomas Michels,
Christopher H. Ray,
Liya E. Yu,
Neal A. Bertrand,
Samuel M. Stavis,
Vladimir Aksyuk,
James Alexander A. Liddle,
Brian A. Bryce,
Nicolae Lobontiu,
Yuxiang Liu,
Meredith Metzler,
Gerald G Lopez,
David A. Czaplewski,
Leonidas E. Ocola,
Pavel Neužil,
Vojtěch Svatoš,
Slava Krylov,
Christopher B. Wallin,
Ian Gilbert,
Kristen A. Dill,
Richard Kasica,
Kartik Srinivasan,
Gregory Simelgor,
Juraj Topolancik
Publication year - 2016
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.6028/nist.hb.160
Subject(s) - toolbox , nanolithography , computer science , programming language , medicine , fabrication , alternative medicine , pathology