Open AccessMethods of measurement for semiconductor materials, process control, and devices quarterly report :
Author(s) -
W Murray Bullis
Publication year - 1972
Language(s) - English
Resource type - Reports
DOI - 10.6028/nbs.tn.727
Subject(s) - semiconductor , process (computing) , semiconductor device , process control , materials science , optoelectronics , computer science , nanotechnology , operating system , layer (electronics)