Open AccessApplication of capacitor microphones and magnetic pickups to the tuning and trouble shooting of microelectronic ultrasonic bonding equipment
Author(s) -
George G. Harman
Publication year - 1971
Language(s) - English
Resource type - Reports
DOI - 10.6028/nbs.tn.573
Subject(s) - microelectronics , ultrasonic sensor , acoustics , trouble shooting , engineering , capacitor , electrical engineering , materials science , computer science , mechanical engineering , physics , voltage , reliability engineering