Open AccessMethods of measurement for semiconductor materials, process control, and devices :
Author(s) -
A J Baroody,
W Murray Bullis
Publication year - 1970
Language(s) - English
Resource type - Reports
DOI - 10.6028/nbs.tn.560
Subject(s) - semiconductor , process (computing) , materials science , optoelectronics , computer science , operating system