Open AccessThe capabilities and limitations of auger sputer profiling for studies of semiconductors
Author(s) -
Sarah Schwartz,
C. R. Helms,
W. E. Spicer,
N. Taylor
Publication year - 1981
Language(s) - English
Resource type - Reports
DOI - 10.6028/nbs.sp.400-67
Subject(s) - profiling (computer programming) , auger , semiconductor , materials science , computer science , nanotechnology , optoelectronics , physics , atomic physics , operating system