Open AccessNotes on SEM examination of microelectronic devices
Author(s) -
John R. Devaney,
K. O. Leedy,
William J. Keery
Publication year - 1977
Language(s) - English
Resource type - Reports
DOI - 10.6028/nbs.sp.400-35
Subject(s) - microelectronics , computer science , nanotechnology , materials science