
Computer software for the computation of the scattered field and the optical microscope image of line objects patterned in thick layers
Author(s) -
Diayyssonen
Publication year - 1987
Language(s) - English
Resource type - Reports
DOI - 10.6028/nbs.ir.87-3618
Subject(s) - line (geometry) , computation , microscope , software , optics , computer graphics (images) , optical microscope , field (mathematics) , image (mathematics) , computer science , materials science , computer vision , physics , mathematics , algorithm , geometry , scanning electron microscope , pure mathematics , programming language