
RADCNBS international workshop moisture measurement and control for microelectronics (IV) :
Author(s) -
Didier Kane,
Benjamin A. Moore,
W Janes Walters
Publication year - 1987
Language(s) - English
Resource type - Reports
DOI - 10.6028/nbs.ir.87-3588
Subject(s) - microelectronics , moisture , control (management) , environmental science , engineering physics , engineering , library science , materials science , computer science , nanotechnology , composite material , artificial intelligence