Open AccessAnalysis of oxide and oxidematrix interfaces in silicon nitride
Author(s) -
N. J. Tighe
Publication year - 1982
Language(s) - English
Resource type - Reports
DOI - 10.6028/nbs.ir.82-2574
Subject(s) - nitride , oxide , silicon nitride , materials science , silicon , silicon oxide , locos , nanotechnology , optoelectronics , metallurgy , layer (electronics)